ADVANCES IN APPLIED PHYSICS

A Russian Scientific and Technical Journal
2013, Vol. 1, No. 2

Experimental study of the high-current impulse magnetron discharge with controllable magnetic field configuration

A.V. Kaziev, P.A. Khromov, I.A. Shchelkanov, G.V. Khodachenko, T.V. Stepanova, and A.V. Tumarkin

National Research Nuclear University “MEPhI”
31 Kashirskoe shosse, Moscow, 115409, Russia
E-mail: avkaziev@gmail.com

Experimental results concerning the effect of the additional magnetic field generated by specially designed magnetic coil system on the spatial distribution of sputtered material in high-current impulse magnetron discharge (HCMD) are presented. The parameters of the HCMD plasma have been measured for both basic and modified magnetic field configurations. The results show that the additional magnetic field does not affect the plasma parameters significantly. However, the film deposition rate increases notably as well as the efficiency of the cathode material utilization.

PACS: 52.80.Sm, 52.75.-d, 52.70.-m, 52.25.Xz, 81.15.Cd
Keywords: pulsed discharge, magnetron discharge, control of the sputtered particle flux, deposition rate, pulsed probe diagnostics.

Bibliography – 6 references Received February 10, 2013

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