ADVANCES IN APPLIED PHYSICSA Russian Scientific and Technical Journal2013, Vol. 1, No. 2 |
Features of the UV 320x256 AlGaN p-i-n FPAsK.O. Boltar1,2, I.D. Burlakov1, M.V. Sednev1, and N.I. Iakovleva11Orion Research-and-Production Association, 46/2 Enthusiasts highway, Moscow, 111123, Russia E-mail: orion@orion-ir.ru 2Moscow Institute of Physics and Technology 9 Institute al., Dolgoprudny, Moscow Region, 141700, Russia
The UV 320x256 AlGaN FPAs on the basis of p-i-n photodiodes with 30 μm pitch and 20x20 μm area
have been formed and investigated to approve the capability of UV imager creation. Performance of UV p-i-n photodiodes
has been estimated by measuring the current-voltage characteristics. The dark currents of mesa structure elements
were less than 10-13 A and resistance were more than 1012 Ohm·cm.
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