ADVANCES IN APPLIED PHYSICSA Russian Scientific and Technical Journal2013, Vol. 1, No. 2 |
Experimental study of the high-current impulse magnetron discharge with controllable magnetic field configurationA.V. Kaziev, P.A. Khromov, I.A. Shchelkanov, G.V. Khodachenko, T.V. Stepanova, and A.V. TumarkinNational Research Nuclear University “MEPhI” 31 Kashirskoe shosse, Moscow, 115409, Russia E-mail: avkaziev@gmail.com
Experimental results concerning the effect of the additional magnetic field generated by specially
designed magnetic coil system on the spatial distribution of sputtered material in high-current impulse magnetron
discharge (HCMD) are presented. The parameters of the HCMD plasma have been measured for both basic and modified
magnetic field configurations. The results show that the additional magnetic field does not affect the plasma
parameters significantly. However, the film deposition rate increases notably as well as the efficiency of the
cathode material utilization.
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